Mass Flow Controllers

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CXE 602950 AFC 550A flow controller. 32 H2, 7800/7810/7700. CXE stocks a set of our most commonly used flow controllers. All of our “corrosive flowstream” flow controllers contain Kalrez ä seals.

Part Number: CXE 602950

Part Name: Mass Flow Controller

Area Used: Gas Box

Basic Description: AFC 550A 32H2 Source,Inject

Complete Description: CXE 602950 AFC 550A flow controller. 32 H2, 7800/7810/7700. CXE stocks a set of our most commonly used flow controllers. All of our “corrosive flowstream” flow controllers contain Kalrez ä seals. Additional part numbers:

• 602596 AFC, 25 H2
• 602601 AFC, 14 N2
• 602590 AFC 550A, 32 H2, Source, Inject
• 602594 AFC 550A, 34 H2, Diluent
• 602599 AFC 550A, 13 N2
• 602592 AFC 550A, 33 H2
• 670464 5% SiH4, AFC Flowstream Option
• 602593 AFC, 14 H2
• 602595 AFC 550A, 54 H2
• 670468 SiCl4, AFC Flowstream Option
• 670469 SiCl3 AFC Flowstrream Option
• 602600 AFC 550A, 33 N2
• 670470 SiH2Cl2, AFC Flowstream Option
• 602611 AFC 550A, 34 H2
• 670471 NH3, AFC Flowstream Option
• 670475 CO2, AFC Flowstream Option