Plumbing Lines
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 All plumbing lines are fabricated to be dimensionally the same as the original
lines. CXE fabricates all our gas lines from clean electropolished tubing.
We have replaced all the original socket weld fittings with ATW ä and
buttweld connections. As an option, we have replaced all bends with microfit
fittings.
Upon request CXE has fabricated all gas lines with VCR ä connections.
Since VCR ä Valves and fittings are longer than the original VCO ä ,
and all components remained in their original locations, all plumbing line
lengths must be properly sized. Any reactor plumbing line is available in standard
or customer specific lengths. Just call with the part number for a quotation.
Additional Part Numbers:
Part Number |
Description |
Model |
CXE 670508 |
Plumbing, H2 Manifold, N-Dope & P-Dope
ONLY! |
7700 |
CXE 670840 |
Plumbing, N2 Manifold Tee, Gas Panel
Assembly |
7810/7700 |
CXE 670838 |
Plumbing, H2 Inlet, Gas Panel Assembly |
7810/7700 |
CXE 670997 |
Plumbing, Line HCl Source |
7810/7700 |
CXE 670267 |
Plumbing, H2 Source |
7810/7700 |
CXE 670268 |
Plumbing, H2 Pressure Switch Tee |
7810/7700 |
CXE 670270 |
Plumbing, H2 Main Inlet |
7810/7700 |
CXE 671063 |
Plumbing, N2 Gauge Tee |
7810/7700 |
CXE 671062 |
Plumbing, N2 Manifold |
7810/7700 |
CXE 671150 |
Plumbing, Line, Radiometer Purge, Restrictor |
7810/7700 |
CXE 670999 |
Plumbing, HCl Main Inlet |
7810/7700 |
CXE 670278 |
Plumbing, HCl Manifold Vent (Bypass/Atmo/RP
Different) |
7810 |
CXE 670280 |
Plumbing, Mainstream Inject |
7810/7700 |
CXE 670839 |
Plumbing, N2/N2 Inject, Gas Panel Assembly |
7810/7700 |
CXE 670282 |
Plumbing, N2 Work Deck Outlet |
7810/7700 |
CXE 670283 |
Plumbing, Vacuum Work Deck Outlet |
7810/7700 |
CXE 671040 |
Plumbing, Manifold, Main, Gas Panel
Assembly |
7810/7700 |
CXE 670998 |
Plumbing, Line, HCl Bypass Inlet |
7810/7700 |
CXE0050-14002 |
Plumbing, Manifold, Vent Outlet |
7700 |
CXE 671122 |
Plumbing, Manifold, Flow Switch / Bulkhead |
7810 |
CXE 671123 |
Plumbing, Manifold, Flow Switch / Flow
Switch |
7700 |
CXE 0050-14001 |
Plumbing, Manifold, Flow Switch / Flow Switch |
7700 |
CXE 670260 |
Plumbing, Dopant Source |
7810/7700 |
CXE 671161 |
Plumbing, Dopant, Gas Panel |
7810/7700 |
CXE 670623 |
Plumbing, Plumbing, Source |
7810/7700 |
CXE 670491 |
Plumbing, Bubbler Carrier, Single Tylan |
7810/7700 |
CXE 670492 |
Plumbing, Bubbler Return, Single Tylan |
7810/7700 |
CXE 671045 |
Plumbing, Line, Single Tylan Backpressure |
7810/7700 |
CXE 670495 |
Plumbing, Carrier, D-Tylan |
7810/7700 |
CXE 670496 |
Plumbing, Return, D-Tylan |
7810/7700 |
CXE 670493 |
Plumbing, Bubbler, Carrier, D-Tylan |
7810/7700 |
CXE 670494 |
Plumbing, Bubbler Return, D-Tylan |
7810/7700 |
CXE 671041 |
Plumbing, Line, Tylan Backpressure,
Right Hand |
7810/7700 |
CXE 671042 |
Plumbing, Line, Tylan Backpressure,
Left Hand |
7810/7700 |
CXE 670263 |
Plumbing, SiCl4, Source |
7810/7700 |
CXE 670263 |
Plumbing, SiHCl3, Source |
7810/7700 |
CXE 670263 |
Plumbing, SiH2Cl2, Source |
7810/7700 |
CXE 670263 |
Plumbing, NH3, Source |
7810/7700 |
CXE 670263 |
Plumbing, CO2, Source |
7810/7700 |
CXE 670841 |
Plumbing, Line, Foreline Purge |
7810/7700 |
CXE 0010-17000 |
Plumbing, Dual Vent Assembly |
7810/7700 |
CXE 0010-17001 |
Plumbing, Single Vent, Gas Panel |
7700 |
CXE 0010-17000 |
Plumbing, Dual Vent Gas Panel |
7700 |
CXE 0020-17001 |
Plumbing, Vent Manifold |
7810/7700 |
CXE 671154 |
Plumbing, Vent Line Gas Panel |
7810/7700 |
CXE 671155 |
Plumbing, Vent Manifold, Inlet |
7810/7700 |
CXE 670221 |
Plumbing, Line-Purge, Table Top Run |
7810 |
CXE 670219 |
Plumbing, Line-Purge, Port Run |
7810 |
CXE 671120 |
Plumbing, Line Prepurge, Make-Break
Port Run |
7810 |
CXE 670277 |
Plumbing, Line Table Top Run |
7810 |
CXE 670858 |
Plumbing, Line, Center Purge, Rotation
Port Run |
7810 |
CXE 670337 |
Plumbing, Line, Left Inject, Table Top
Run |
7810 |
CXE 679283 |
Plumbing, Line, Seal Vac, Bulkhead Run |
7810 |
CXE 670436 |
Plumbing, Line, Return Dual Tylan Gas
Panel Assy |
7810 |
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