Valves

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All valves are normally stocked at CXE. Valves are available in both "BK" and "BN" series. All valves are available with either VCO ä or VCR ä fittings. (Valves with VCR ä fittings are longer. Gas line lengths have to be compensated).

AMT Pat Number	Description
CXE 825128	Manual Shut Off N2	MV 1
CXE 825128	Manual Shut Off H2	MV 2
CXE 825109	Manual Shut Off HCl	MV 3
CXE 825109	Manual Shut Off SiH2Cl2	MV 4
CXE 825109	Manual Shut Off SiHCl3	MV 5
CXE 825109	Manual Shut Off P Dope	MV 6
CXE 825109	Manual Shut Off N Dope	MV 7
CXE 645135	Rotation H2	PV 1
CXE 827313	Gas Panel Iso	PV 2
CXE 827313	H2 Source	PV 3
CXE 645135	HCl Source	PV 4
CXE 645135	HCl Vent	PV 5
CXE 678300	Etch	PV 6
CXE 645135	N Dope Source	PV 7
CXE 645135	N Dope Diluent Vent	PV 8
CXE 645135	P Dope Source	PV 9
CXE 645135	P Dope Diluent Vent	PV 10
CXE 645135	SiH4 Source	PV 11
CXE 645135	SiH2Cl2 Source	PV 12
CXE 645135	SiHCl3 Source	PV 14
CXE 645135	NH3 Source	PV 15
CXE 645135	CO2 Source	PV 16
CXE 645135	Rotation Purge	PV 17
CXE 827313	Inject Vent	PV 18
CXE 678300	Deposit	PV 19
CXE 827313	Left Inject	PV 20A
CXE 827313	Right Inject	PV 20B
CXE 645135	N Dope H2	PV 21
CXE 678300	N2 Purge Off	PV 22
CXE 827314	Vacuum Pump Purge	PV 23
CXE 827313	Vac Vent BMV Bypass	PV 24 A
CXE 827313	Atm Vent BMV Bypass	PV 24 B
CXE 678209	Slow Pump	PV 25
CXE 645135	P Dope H2	PV 26
CXE 679038-M	Atm Exhaust Valve	PV 29
CXE 825146	High Vacuum Valve	PV 30
CXE 645135	High HCl By-Pass	PV 31
CXE 645134	LDS Vent	PV 32
CXE 827313	LDS Vent	PV 33
CXE 645135	Dual Seal Vent	PV 47
CXE 827313	Atm Vent	PV 48A
CXE 826102	Vacuum Vent	PV 48B
CXE 827313	Atm Vent	PV 48C
CXE 826102	Vacuum Vent	PV 48D
CXE 645136	Rotation N2 Purge Off	PV 49

CXE Equipment Services, LLC
100 Zachary Road | Manchester, NH 03109
TEL (603) 606-5411 | FAX (603)606-5911
Email: sales@cxe-equip.com

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