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 Part
Number: CXE 602950
Part Name: Mass Flow Controller
Area Used: Gas Box
Applied Materials Model Number:
Basic Description: AFC 550A 32H2 Source,Inject
Complete Description: CXE 602950 AFC 550A flow controller. 32 H2, 7800/7810/7700. CXE stocks a set of our most commonly used flow controllers. All of our “corrosive flowstream” flow controllers contain Kalrez ä seals. Additional part numbers: 602596 AFC, 25 H2, 602601 AFC, 14 N2, 602590 AFC 550A, 32 H2, Source, Inject, 602594 AFC 550A, 34 H2, Diluent, 602599 AFC 550A, 13 N2, 602592 AFC 550A, 33 H2, 670464 5% SiH4, AFC Flowstream Option, 602593 AFC, 14 H2, 602595 AFC 550A, 54 H2, 670468 SiCl4, AFC Flowstream Option, 670469 SiCl3 AFC Flowstrream Option, 602600 AFC 550A, 33 N2, 670470 SiH2Cl2, AFC Flowstream Option, 602611 AFC 550A, 34 H2, 670471 NH3, AFC Flowstream Option, 670475 CO2, AFC Flowstream Option
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