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Number: CXE 645136
Part Name: Valve
Area Used: Rotation
Applied Materials Model Number:
Basic Description: "BY" Valve, 3 Port, Nupro
Complete Description: CXE 645136 Valve, Nupro "BY" valve 7810/7700. This valve is available with the original VCO or with VCR fittings. (Valves with VCR ä fittings are longer. Gas line lengths have to be compensated). Valves are available in both "BK" and "BN" series. Additional part numbers: CXE 825128 Manual Shut Off N2 MV 1, CXE 825128 Manual Shut Off H2 MV 2, CXE 825109 Manual Shut Off HCl MV 3, CXE 825109 Manual Shut Off SiH2Cl2 MV 4, CXE 825109 Manual Shut Off SiHCl3 MV 5, CXE 825109 Manual Shut Off P Dope MV 6, CXE 825109 Manual Shut Off N Dope MV 7, CXE 645135 Rotation H2 PV 1, CXE 827313 Gas Panel Iso PV 2 , CXE 827313 H2 Source PV 3 , CXE 645135 HCl Source PV 4 , CXE 645135 HCl Vent PV 5 , CXE 678300 Etch PV 6 , CXE 645135 N Dope Source PV 7 , CXE 645135 N Dope Diluent Vent PV 8 , CXE 645135 P Dope Source PV 9 , CXE 645135 P Dope Diluent Vent PV 10 , CXE 645135 SiH4 Source PV 11 , CXE 645135 SiH2Cl2 Source PV 12 , CXE 645135 SiHCl3 Source PV 14 , CXE 645135 NH3 Source PV 15 , CXE 645135 CO2 Source PV 16 , CXE 645135 Rotation Purge PV 17 , CXE 827313 Inject Vent PV 18, CXE 678300 Deposit PV 19 , CXE 827313 Left Inject PV 20A , CXE 827313 Right Inject PV 20B , CXE 645135 N Dope H2 PV 21, CXE 678300 N2 Purge Off PV 22 , CXE 827314 Vacuum Pump Purge PV 23 , CXE 827313 Vac Vent BMV Bypass PV 24 A , CXE 827313 Atm Vent BMV Bypass PV 24 B , CXE 678209 Slow Pump PV 25 , CXE 645135 P Dope H2 PV 26, CXE 679038-M Atm Exhaust Valve PV 29, CXE 825146 High Vacuum Valve PV 30, CXE 645135 High HCl By-Pass PV 31, CXE 645134 LDS Vent PV 32, CXE 827313 LDS Vent PV 33, CXE 645135 Dual Seal Vent PV 47, CXE 827313 Atm Vent PV 48A, CXE 826102 Vacuum Vent PV 48B, CXE 827313 Atm Vent PV 48C, CXE 826102 Vacuum Vent PV 48D, CXE 645136 Rotation N2 Purge Off PV 49
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