Maintenance Training

Courses have been designed to be 50% classroom and 50% hands on using a customer supplied or CXE reactor. The goal is to familiarize the maintenance and repair groups on the operations and the maintenance involved in supporting a reactor in a production environment.

A typical class would review each section of the reactor and discuss components and their hazards. Component wear and failures are reviewed as to how they have an effect on the process and the quality of the epi. Settings and adjustments that are critical to the reactor performance are identified, explained and properly set. All interlocks are demonstrated and their calibration and failure rates are reviewed. The manuals are reviewed, schematics are explained and signals are followed from their source to objective. A large database of instructional material enables courses to be tailored to specific needs. One class could have more scheduled preventative maintenance while another may be directed towards troubleshooting and corrective maintenance.

All of our training is performed by individuals that have been in the industry and have experienced problems and the solutions to them.

Who should attend:

• Equipment engineers
• Technicians
• Process people that cannot resist

What is covered:

Safety

• Identification of the hazards of the reactor.
• The procedures that are needed to safely maintain the reactor.

Familiarization with the manuals

• Each manual is reviewed.
• Manuals are continually used to identify and resolve problems.

Schematics

• How to read and follow signals through the reactor and console.

Cause, effect and cure scenarios, such as:

• Silicon defects - what goes wrong in the equipment and how it is fixed.
• Resistivity and thickness control - what part of the reactor could cause the problem and how are they normally adjusted in the reactor.

Maintenance Procedures

• How the lack of maintaining the reactor could affect the product.
• The class is instructed using your company’s procedures.
  • The way you want it done.
  • We could recommend proven procedures and schedules.

Reactor troubleshooting

• Problems are presented and non-destructive bugs are placed into the reactor for troubleshooting.
• As much time as is allowed is spent resolving problems.

Equipment trends

• How to evaluate the data trends that are captured during a run.
• Using trended data to predict failures.
• How should you incorporate SPC?

When the training takes place:

Whenever your schedule allows

Where the training takes place:

• At your site.
• At CXE.

Why you should consider maintenance training:

• This is practical maintenance training that works.

Course duration:

• Typical material is covered in 5 days.