Process Training

CXE offers process training that is geared to your equipment and your process. Process improvements for increased yield or product consistency is discussed, as it relates to your tool.

Subject matter is covered in everyday, easy to understand language using an interactive format.

All of our training is performed by individuals that have been in the industry and have experienced these and other problems and the solutions to them.

Who should attend:

• Process engineers and technicians
• Production operators

What is covered:

Cause and effect scenarios, such as:

• Silicon defects; are they caused by the process, handling, or the equipment?
• Resistivity control; are your wafers the culprit, or do you have a dopant control problem?
• Maintenance procedures; is someone taking an innocent short cut that can affect the process and consequently the product?

Operation of the tool

• What is the best way to load or unload wafers?
• When is the best time to load or unload wafers?
• When is it necessary to make a process adjustment, or when do you not make an adjustment and do something else?

Defect identification and elimination

• Do you know if you have any defects?
• Are you using the right equipment and technique to detect defects?
• Do you know what your defects are and what causes them?
• How can they be eliminated?

Programming the tool

• What are the tradeoffs for a short timed production run?
• How long and how often should a high etch program run?

Product processed in the tool

• Are your wafers causing you a thickness uniformity problem?
• Is previous processing causing a resistivity control issue?

Process trends

• When should you perform a BMV adjustment?
• When should you make a temperature change?
• When should you make a jet adjustment?
• How should you incorporate SPC?

When the training takes place:

Whenever your schedule allows

Where the training takes place:

At your site

Why you should consider process training:

Improvements are possible, and are not only desired in today's business climate, but are required to keep ahead of the competition

If you can relate to any of these questions, you need this course. If any of these situations sound new to you, you need this course.

CXE can help answer these questions and help you make the correct process related improvements.

Course duration:

Typical material is covered in 3 days

Please contact CXE and together we can construct a course outline to meet your specific needs.